Sweeping the tilt angle can strengthen movie thickness uniformity and sidewall coverage when also preventing higher Vitality-mirrored neutral species for crucial processes.
In-situ optical monitoring and Management is accessible by Angstrom’s optical checking & Manage package deal.
Concentrate on rotation and carousel indexing Every single have torque feeling, protecting against any system troubles due to slips or jams in rotation.
In-situ ellipsometry offers essential info on the functionality of an optical movie though it is staying deposited.
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Variable angle stages permit for really strong slender movie procedures. On the other hand, one of its major difficulties is reproducibility. The substrate is usually established at a very oblique angle in relation towards the supply, plus the High-temperature metal components movies are quite sensitive for the precision of the angle.
Angstrom went to terrific lengths to refine the tolerances of the lean angle, improving upon it from a variation of nearly a complete degree on non-Angstrom systems I’ve used to less than 0.
Our distinctive layout permits direct or indirect monitoring from the variable angle stage, reducing the necessity for tooling things or simply a witness glass changer. Learn more concerning the Optical Monitoring & Management bundle listed here.
Along with sample rotation, the variable angle phase that is certainly utilized for Reticle® provides for in-developed angular motion through the deposition flux.
The IBSD course of action produces a hugely energetic flux of deposition material, resulting in films with improved density, hardness, and area roughness when compared to These deposited by evaporation processes.
The deposition ion source is directed toward a fabric concentrate on which has been optimized in both measurement and situation for the essential deposition geometry.
Self-aligned ion optics are configured specifically for the specified deposition needs and geometry within your process.
A very low-frequency neutralizer guarantees steady beam operation with out contamination from a traditional filament.
Dynamic uniformity shaping is achieved using a flux correction defend in between the deposition supply as well as the substrate.
Considerate structure in the ion beam concentrating optics confines the beam totally to the region on the focus on, eradicating any threat of contamination.